About: http://webisa.webdatacommons.org/215436460

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ubstrate from plating, etching, or other processing steps, or a reactive gas may be circulated through the channels to chemically alter the substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com