PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Further, the wafer may have an initial diameter of about 200 mm, about 300 mm, or other sizes, including diameters larger than 300 mm. [0047] The wafer is cleaned and inspected (Step 212) and then may, or may not, be laser-marked (Step 214).
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com