| http://www.w3.org/ns/prov#value | - The critical feature dimension d of the exposed portion of the nitride layer 70 (opening 102 in the patterned photoresist 100) is about 0.25 ??m or less, including about 0.18 ??m or less, about 0.09 ??m or less, about 0.075 ??m or less and about 0.05 ??m or less, depending on the wavelength of the radiation used.
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