About: http://webisa.webdatacommons.org/215688403

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, the upper layer metal layer on the outer periphery of the spiral inductor element and upper layer metal layer 19 used for the circuits other than the inductor element are patterned as seen in FIG. 13(A) using etching mask 21.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr