PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Thereafter, remaining oxide of layer 98 over region 68 would be etched selectively relative to nitride and other underlying material to define a covering pattern of masking oxidation barrier material over first active region 68, and to upwardly expose second active regions 70, leaving the construction of FIG. 13.
http://www.w3.org/ns/prov#wasQuotedFrom
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