About: http://webisa.webdatacommons.org/215799254

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 10, wherein the interconnect features are a member selected from the group consisting of plug, via, contact, line, and wire. 18.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com