About: http://webisa.webdatacommons.org/21583393

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The control part 300 comprises a CPU, an MPU, other processors, and memories such as a RAM and a ROM so as to calculate an emissivity ?? and a substrate temperature T of the wafer W based on the radiation intensities E1(T) and E2(T).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com