About: http://webisa.webdatacommons.org/215892894

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The hydrogen-bearing source chemical preferably comprises a species that is to be incorporated in the thin film, such as nitrogen, oxygen or carbon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com