About: http://webisa.webdatacommons.org/216044562

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface of the substrate 10 has deposited or formed on it a thick layer 2 of silicon oxide, a thick composite layer of silicon nitride and silicon oxide or a thick layer of other suitable insulating material, such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com