| http://www.w3.org/ns/prov#value | - The sensing material may be formed in a discrete portion on a portion of the deflectable arm, such as on the tip end of the cantilever, or as a continuous coating of the sensing element may be formed over the surface such that a portion of the deflectable arm is embedded therein. [0021] The microcantilever itself is formed on a substrate separate from the surface including the sensing material.
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