About: http://webisa.webdatacommons.org/216380989

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	20120119312METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL COMPONENT; AND A MICROELECTROMECHANICAL COMPONENT - The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org