About: http://webisa.webdatacommons.org/216562715

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The at least one spacer 22 that is present is typically comprised of an oxide, nitride or oxynitride including combinations and multilayers thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com