| http://www.w3.org/ns/prov#value | - Thus, although illustrated and described in the examples below primarily in the context of TiN and TiB2, metal nitrides including but not limited to metal nitrides MXNY, metal silicon nitrides MXSiYNZ, metal aluminum nitrides MXAlYNZ, and metal aluminum silicon nitrides MWAlXSiYNZ (where M is a metal such as Ti, Ta, Hf, Zr, W, etc.), or equivalents may be used within the scope of the invention.
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