About: http://webisa.webdatacommons.org/216611774

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is particularly suitable for a processing apparatus that uses the nanoimprint technology for fine processing to manufacture semiconductor devices, micro electro-mechanical systems (???MEMS's???), and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com