About: http://webisa.webdatacommons.org/216654084

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This is of advantage especially for the subsequent finishing steps, since layer detachments and similar defects are drastically reduced, for example, during an anti-reflection coating, due to the lesser back diffusion under vacuum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com