| http://www.w3.org/ns/prov#value | - The signal line 201 is formed of a laminate film of a barrier conductive film 201 a and a conductive film including copper as its main component 201 b and the current supply line 202 is formed of a laminate film of a barrier conductive film 202 a and a conductive film including copper as its main component 202 b.
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