About: http://webisa.webdatacommons.org/216763755

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The next step is to perform a first epitaxy of a layer 152 with thickness E equal to about 20 ??m, for example between 10 ??m and 30 ??m (FIG. 11B).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com