About: http://webisa.webdatacommons.org/216838015

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectric layer 320 may be deposited by methods known to those of skill in the art, for example chemical vapor deposition (CVD), or sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com