About: http://webisa.webdatacommons.org/216855798

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon 33 is doped by n-type impurities, such as arsenic or phosphorus, through the implantation process (step 51), in the n-channel SBTT area.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com