About: http://webisa.webdatacommons.org/216901432

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The oxide layer is formed over the silicon substrate using any suitable means, such as CVD, dry oxidation, wet oxidation or rapid thermal oxidation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com