About: http://webisa.webdatacommons.org/217121826

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, a flatness of at least 0.5 ??m, and especially 0.3 ??m or better, is desired in photomasks measuring 152???152 mm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com