About: http://webisa.webdatacommons.org/21712591

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The device of claim 16 wherein the third encapsulation layer is an insulating material including silicon oxide, silicon nitride, BPSG, PSG and/or SOG.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com