About: http://webisa.webdatacommons.org/217255277

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Polysilicon layer 49 is then etched using conventional techniques to form a desired pattern such as the pattern shown in FIG. 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com