About: http://webisa.webdatacommons.org/217263470

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, the dependency of process parameters, such as temperature and duration of the heat treatment for converting silicon into a silicide for metals of interest, may be obtained empirically or theoretically.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com