About: http://webisa.webdatacommons.org/217375371

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the process layer 38 may be comprised of polysilicon, a metal, e.g., aluminum, or an insulating material having a dielectric constant less than 5.0, such as silicon dioxide, silicon oxynitride, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com