About: http://webisa.webdatacommons.org/217448272

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Formation of spacers 18 may be advantageous for reasons including the ability to form lightly-doped regions under the spacers which may lower the maximum electric field developed at the drain end of the channel.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com