About: http://webisa.webdatacommons.org/217515184

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the gas used for film formation is a gas represented by the structural formula Si.sub.n H.sub.2n+2, Si contributes to film formation, and some of the hydrogen atoms become H.sub.2 and are evacuated.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com