About: http://webisa.webdatacommons.org/217583810

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 shows a flow chart of production of a semiconductor device (e.g., a semiconductor chip such as IC and LSI, a liquid crystal panel, CCD, and the like).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com