About: http://webisa.webdatacommons.org/217801224

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other methods utilize a further photolithographic step and encapsulate the metal either with a dielectric, such as e.g. benzocyclobutene (BCB), or other corrosion-resistant materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk