About: http://webisa.webdatacommons.org/217868059

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A transparent insulating film, such as silicon oxide, silicon nitride, silicon nitride oxide, tantalum oxide, aluminum oxide (alumina) is used for the capacitance insulating film 105.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com