About: http://webisa.webdatacommons.org/218720651

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These are approximate numbers that depend on the precise pattern being written, the precise e-beam machine used, the nature of the substrate, the required accuracy, resist sensitivity, and other factors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com