About: http://webisa.webdatacommons.org/218839620

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The apparatus of claim 1, wherein the polishing pad includes a polishing layer including the light transmissive element and a backing layer having an aperture aligned with the light transmissive element.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es