About: http://webisa.webdatacommons.org/218990544

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When a substrate including a buried insulating layer is used, the etch depth is predefined by thickness of top Si layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com