About: http://webisa.webdatacommons.org/219021403

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film thickness of the nitride film 816 is for example 100 nm to 300 nm, and the film is formed by LPCVD (FIG. 102A).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr