About: http://webisa.webdatacommons.org/219025500

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method of using scattering bars between features for correcting for proximity effects when features are spaced such that conventional scattering bar spacing cannot be achieved.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com