About: http://webisa.webdatacommons.org/219049199

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interlayer insulating film 15 may comprise a single film composed of SiO, SiN or an organic material such as acryl or the like, or a multi-layered film composed of any combination of these materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com