PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The present invention relates to a semiconductor device, and more particularly to a fabrication method for a metal oxide semiconductor field effect transistor (MOSFET) device capable of settling deterioration of short channel effect (SCE) due to decrease in critical size of gates and preventing junction leakage from occurring in a junction region between ion regions.
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  • google.com