About: http://webisa.webdatacommons.org/219415063

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method as recited in claim 25, wherein said anisotropic etching is a wet etching step.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com