About: http://webisa.webdatacommons.org/219475161

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A conductive material, such as aluminum may then be deposited across interlevel dielectric 12 and into openings 10 and 20.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com