| http://www.w3.org/ns/prov#value | - The stationary base 2 is preferably made of a ceramic, such as SiC, which is approximately equal in linear expansion coefficient to silicon, taking into consideration requirements such that: the stationary base 2 is electrically insulated from the housing 4; and thermal strains due to the difference in linear expansion coefficient between the stationary base 2 and the housing 4 are to be reduced.
|
