About: http://webisa.webdatacommons.org/219911622

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the deformation information, it is possible to use information including information relating to flexing of the mask substrate due to its own weight.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com