| http://www.w3.org/ns/prov#value | - A workpiece is mounted on the spinning disk, being held by a vacuum chuck or other chucking means and caused to spin at a high speed with the spinning disk, while a liquid chemical to be applied, such as a photoresist solvent, liquid developer, etching liquids, cleaning deionized water, etc., is dispensed onto the workpiece by means of respective nozzles.
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