About: http://webisa.webdatacommons.org/220239485

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	2) Observation of Cross-Sectional Configuration of the Resist lower Layer Film after Dry Etching with a Gas mainly containing oxygen gas
http://www.w3.org/ns/prov#wasQuotedFrom	google.com