About: http://webisa.webdatacommons.org/220260009

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	CVD or ALD precursors for low temperature deposition of thin films of high k capacitor materials such as Ta2O5 and BiTaO4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es