About: http://webisa.webdatacommons.org/220308470

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More particularly, the invention is directed to a process of fusing of two or more silicon wafers together, which assembly is useful in production of dielectrically isolated or other semiconductor devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es