About: http://webisa.webdatacommons.org/220318501

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Consequently, a feature common to biosensors, microfluidics and biochips is that photo-lithographic processes are employed in their fabrication and substrates such as silicon, glass or quartz are used [8].
http://www.w3.org/ns/prov#wasQuotedFrom	mdpi.com