About: http://webisa.webdatacommons.org/220348353

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Ion implantation is a well known method in which impurities, sometimes referred to as dopants, are introduced into various layers of a microelectronic device in order to modify their electrical properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com