About: http://webisa.webdatacommons.org/220450716

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, in a manufacturing process of a semiconductor device or a liquid crystal device, a substrate is subjected to a process such as etching, sputtering, CMP (Chemical Vapor Deposition) or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com