About: http://webisa.webdatacommons.org/220552186

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, it is apparent that a metal plate such as an aluminum or stainless plate may be used as a base, and the membrane 24 may be formed of an insulating film consisting of SiO2, Si3 N4, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com