About: http://webisa.webdatacommons.org/22058877

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The transistor of claim 1 wherein said gate insulator structure further comprises a third layer and a fourth layer each of which substantially comprises at least one compounds including gallium and at least one of sulphur and oxygen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com